Air-Float Conveyor

It is possible to be no damage on substrates during conveyances because of the non-contact in the quality area. The air film is formed between the air chamber and the substrate.
It is possible to convey large size of substrates because there is no deflection of the conveyance roller as experiencing on the roller conveyor.


	Horizontally conveying the substrate. The air from air chambers floats the center of a substrate. Contact the edge of a substrate as the non-quality with the edge roller for supporting the portion.

	Substrate Size	600mm800mm-2200mm2400mm
	Clean Room	Class 100
	Substrate Speed	2-20m/min
	Air Consumption	500-1500L/min
	Fly Height	0.4mm


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The air film is formed between the air chamber and the substrate what stand elect enable the non-contact conveyance. Even the changeover process, the air floating function is kept, and the portion change of substrates can be done between upright and horizontal under the non-contact condition.

Substrate Size	600mm800mm-2200mm2400mm
Clean Room	Class 100
Substrate Speed	2-20m/min
Air Consumption	Stand Elect 70L/min 0.3MPa Horizontal 500-1500L/min
Fly Height	Stand Elect 1mm Horizontal 0.4mm


Air-Float Alignment Device		Non-Contact Changeover Equipment
	Alignment device keeping the substrate is floated.		Changeover equipment with Air-Float system.